Within only 15 months our team has developed the complete customized solution and has manufactured 3 prototypes. The filigree structure allows through light measurements for the 300 mm chip production with the utmost precision of less than 1 nm. In particular, the air bearings are designed for lowest air consumption with the highest stiffness.

Particularly in applications with highest precision and dynamic, AeroLas’s air bearing technology proves unique and superior performance. Our drive with two symmetrical arranged iron-free linear motors achieves an acceleration of up to 400 m/s² with a jerk of up to 1,000,000 m/s³.

We had the task to support and guide a carbon fiber mirror (surface 500 mm x 250 mm) with an acceleration of up to 300 m/s² and a flexible movement profile with high precision. Our solution consists of an air-guided drive: The beam (length 900 mm) which is fixed at the mirror, is manufactured of carbon fibre and carries the magnets of the linear motors. Cables/tubes (motor, air bearing, measurement system) are not moved in order to avoid breakages due to high load cycles. Our air-bearings are absolutely insensitive against geometric fluctuations as a result of a temperature change.

The positioning unit consists of four air-guided axes: 3 linear and one rotary axis. With a magnetic preload of the air bearings the assembly is both compact and insensitive against temperature influences. The µm-precision of the pipette results from a high tilt stiffness against of the air bearings.

Beside the performance, the reliability is extremely important for a production machine. The air-guided solution is designed statically determined. The iron-core linear motor and piston bearings achieve the preload for the air bearings. Thereby, our drive is easy to assemble and insensitive against geometric variations, for instance through temperature influences or the disposition of the machines.